Measure thickness, flatness, and detect voids 

Silicon Wafer Measurement and Inspection

Lumetrics is a leading provider of non contact thickness measurement gauges for many different products. One such product is semiconductors. In this video, Lumetrics Metrology Scientist, Dr. Paul Thomas, provides insights on using optical metrology to measure and inspect silicon wafers.

Dr. Thomas utilizes the Lumetrics OptiGauge II to demonstrate thickness measurement on a bare silicon wafer and to detect voids on a wafer that has been bonded to glass. The Lumetrics OptiGauge II system is flexible, and can also be configured in such a manner making it simple to determine flatness or bow.

Take a look at our wafer measurement use cases to learn how the OptiGauge II may help you address your semiconductor measurement and inspection challenges.