Robust Analysis of Thickness Measurement Data

Metrology Software

Intuitive and easy to use, Lumetrics' software programs work seamlessly with your OptiGauge and wavefront measurement systems to meet all your metrology needs. Reach out to our team to find out more.

Connect with an Expert

LumetriScan Software explainer video featuring Lumetrics' Technology Development Scientist, David Compertore.

See it in action.

Request a call with our engineering team to see how our software enhances your metrology solutions. 
Request a Demo